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Surface acoustic wave sensors typically use two different quartz chips as substrates.
Release Time:
2020-08-25
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Summary
Since the 1960s, new types of surface acoustic wave devices have a history of more than 40 years. Among them, surface acoustic wave filters are the most widely used, followed by surface acoustic wave sensors. Because the propagation speed and attenuation of surface acoustic waves are closely related to the parameters of their propagation environment and medium, devices made using surface acoustic wave sensors will have high sensitivity.
Surface acoustic wave sensor BD237 typically uses two different quartz wafers as substrates. The former has a higher voltage coefficient, while the latter has good temperature stability. When in contact with gases, liquids, or solid particles in the surrounding environment, special substances and catalytic films are coated on the surface of the surface acoustic wave sensor. By adsorption, the mass of the device changes, forming mass, chemical, or biological sensors.
To improve sensitivity, the sensor structure needs to be improved, such as selecting appropriate substrates, changing the proper cutting direction of the substrate, suitably choosing the sensor electrode materials, and optimizing the sensor structure. For chemical or biological fields, the sensor materials and thickness need to be optimized.
Applications of surface acoustic wave sensors:
1. Rayleigh wave sensors
Rayleigh wave sensors have also become surface acoustic wave sensors. Because the displacement trajectory of Rayleigh waves is elliptical, when propagating in a liquid-fixed environment, energy easily leaks into the liquid. Since it is not suitable for sensor detection in liquid environments, it can only be applied in gas environments. Currently, Rayleigh wave sensors are relatively mature, with some meeting commercial requirements, mainly used for detecting drugs, toxic gases, and harmful gases.
2. Shear horizontal plate mode sensors
Rayleigh wave sensors cannot be used in liquid environments. Usually, acoustic wave modes with horizontal displacement are chosen, such as shear horizontal plate mode sensors. Shear horizontal plate mode sensors are a type of acoustic wave sensor. The sensitivity of mass detection depends on the thickness of the plate. The thinner the plate, the higher the sensitivity. Its advantage is that there is a shear horizontal displacement on both the upper and lower surfaces, so sensing can be done on both sides. The disadvantage is that the plate is too thin to withstand certain mechanical strength, and research has been limited in recent years.
Surface acoustic wave sensors are widely used due to their high sensitivity, high resolution, high stability, small size, and convenient output signal processing. Surface acoustic wave sensors use various structures and materials for sensing and detecting physical, chemical, and biological parameters in gas and liquid environments.
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发布时间：2020-10-29
发布时间：2020-08-25
发布时间：2020-08-25
发布时间：2020-08-25
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